Invention Grant
- Patent Title: Piezoelectric body film, piezoelectric element, and method for manufacturing piezoelectric element
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Application No.: US16560325Application Date: 2019-09-04
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Publication No.: US11793082B2Publication Date: 2023-10-17
- Inventor: Naoki Murakami , Daigo Sawaki
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP 17070558 2017.03.31
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H10N30/853 ; C01G33/00 ; C23C14/08 ; C23C14/34 ; H10N30/076

Abstract:
To provide a piezoelectric body film and a piezoelectric element from which an excellent piezoelectric characteristic can be obtained even in a high-temperature environment and a method for manufacturing a piezoelectric element.
A piezoelectric body film of the present invention is a piezoelectric body film containing a perovskite-type oxide represented by Formula (1), in which a content q of Nb with respect to the number of all atoms in the perovskite-type oxide and a ratio r of a diffraction peak intensity from a (200) plane to a diffraction peak intensity from a (100) plane of the perovskite-type oxide, which is measured using an X-ray diffraction method, satisfy Formula (2), Formula (1) A1+δ[(ZryTi1-y)1-xNbx]O2, Formula (2) 0.35≤r/q
A piezoelectric body film of the present invention is a piezoelectric body film containing a perovskite-type oxide represented by Formula (1), in which a content q of Nb with respect to the number of all atoms in the perovskite-type oxide and a ratio r of a diffraction peak intensity from a (200) plane to a diffraction peak intensity from a (100) plane of the perovskite-type oxide, which is measured using an X-ray diffraction method, satisfy Formula (2), Formula (1) A1+δ[(ZryTi1-y)1-xNbx]O2, Formula (2) 0.35≤r/q
Public/Granted literature
- US20200006622A1 PIEZOELECTRIC BODY FILM, PIEZOELECTRIC ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT Public/Granted day:2020-01-02
Information query
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