Invention Grant
- Patent Title: MEMS accelerometer with mechanically decoupled proof mass
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Application No.: US17202736Application Date: 2021-03-16
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Publication No.: US11796560B2Publication Date: 2023-10-24
- Inventor: Matti Liukku , Anssi Blomqvist , Hannu Vesterinen
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: SQUIRE PATTON BOGGS (US) LLP
- Priority: FI 205272 2020.03.18
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18 ; G01P1/00 ; G01P15/08

Abstract:
The present invention relates to MEMS (microelectromechanical systems) accelerometers, in particular to an accelerometer designed to reduce error in the accelerometer output. The MEMS accelerometer includes a proof mass, which is capable of movement along at least two perpendicular axes and at least one measurement structure. The proof mass is mechanically coupled to the measurement structure along the sense axis of the measurement structure, such that movement of the proof mass along the sense axis causes the moveable portion of the measurement structure to move, and is decoupled from the measurement structures along an axis or axes perpendicular to the sense axis of the measurement structure, such that movement of the proof mass perpendicular to the sense axis of the measurement structure does not cause the moveable portion of the measurement structure to move.
Public/Granted literature
- US20210293847A1 MEMS ACCELEROMETER WITH MECHANICALLY DECOUPLED PROOF MASS Public/Granted day:2021-09-23
Information query
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