Invention Grant
- Patent Title: In-situ wafer rotation for carousel processing chambers
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Application No.: US16396683Application Date: 2019-04-27
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Publication No.: US11798825B2Publication Date: 2023-10-24
- Inventor: Joseph Yudovsky , Alexander S. Polyak
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/68 ; H01L21/687 ; C23C16/458 ; C23C16/455
Abstract:
Apparatus and methods of processing a substrate in a carousel processing chamber are described. A wafer pedestal has a support surface with a support shaft extending below the wafer pedestal. A roller pinion wheel is below the wafer support around the support shaft. The roller pinion wheel has a plurality of spokes in contact with the support shaft and a wheel with a plurality of roller pinions spaced around the outer periphery of the wheel. Processing chambers incorporating the wafer pedestal and processing methods using the wafer pedestal for in-situ rotation are also described.
Public/Granted literature
- US20190333783A1 In-Situ Wafer Rotation for Carousel Processing Chambers Public/Granted day:2019-10-31
Information query
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