Invention Grant
- Patent Title: Open-ended type substrate receiving cassette and system thereof
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Application No.: US17207182Application Date: 2021-03-19
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Publication No.: US11798829B2Publication Date: 2023-10-24
- Inventor: Yoon Su Kim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20200068454 2020.06.05
- Main IPC: H01L21/673
- IPC: H01L21/673 ; B65G1/14

Abstract:
A cassette which receives a substrate, and a substrate receiving system including a chamber which receives a cassette in which a substrate is loaded are provided. The cassette which receives a substrate includes: a plurality of slot supports stacked in a first direction; and a frame connected to the plurality of slot supports and extending in the first direction, wherein the plurality of slot supports and the frame are opened in an outward direction to receive the substrate, and are closed in an inward direction after the substrate is received.
Public/Granted literature
- US20210384055A1 OPEN-ENDED TYPE SUBSTRATE RECEIVING CASSETTE AND SYSTEM THEREOF Public/Granted day:2021-12-09
Information query
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