Invention Grant
- Patent Title: Fast FOUP swapping with a FOUP handler
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Application No.: US17980016Application Date: 2022-11-03
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Publication No.: US11798830B2Publication Date: 2023-10-24
- Inventor: Theodorus G. M. Oosterlaken , Jeroen Fluit
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A vertical batch furnace assembly for processing wafers having a cassette handling space, a wafer handling space, and a first wall and separating the cassette handling space from the wafer handling space. The first wall has at least one wafer transfer opening in front of which, at a side of the first wall which is directed to the cassette handling space, a wafer transfer position for a wafer cassette is provided. The cassette handling space comprises a cassette storage having a plurality of cassette storage positions and a cassette handler configured to transfer wafer cassettes between the cassette storage positions and the wafer transfer position. The cassette handler has a first cassette handler arm and a second cassette handler arm.
Public/Granted literature
- US20230047885A1 FAST FOUP SWAPPING WITH A FOUP HANDLER Public/Granted day:2023-02-16
Information query
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