Invention Grant
- Patent Title: Semiconductor device and method of fabricating the same
-
Application No.: US17009975Application Date: 2020-09-02
-
Publication No.: US11804459B2Publication Date: 2023-10-31
- Inventor: Jinho Park , Chin Kim , Yongseung Bang , Jiyeon Baek , Jeong Hoon Ahn
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Fish & Richardson P.C.
- Priority: KR 20200012110 2020.01.31
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/522 ; H01L23/532

Abstract:
Disclosed are semiconductor devices and methods of fabricating the same. The semiconductor device includes a first dielectric layer including a first pad, a second dielectric layer on the first dielectric layer, a through electrode that penetrates the second dielectric layer and is electrically connected to the first pad, an upper passivation layer on the second dielectric layer, a second pad on the upper passivation layer, and an upper barrier layer between the upper passivation layer and the second pad. The first pad and the through electrode include a first material. The second pad includes a second material that is different from the first material of the first pad and the through electrode. The second pad includes a first part on the upper passivation layer, and a second part that extends from the first part into the upper passivation layer and is connected to the through electrode.
Public/Granted literature
- US20210242147A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-08-05
Information query
IPC分类: