Invention Grant
- Patent Title: MEMS device comprising a membrane and an actuator
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Application No.: US17208918Application Date: 2021-03-22
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Publication No.: US11807517B2Publication Date: 2023-11-07
- Inventor: Dario Paci , Domenico Giusti , Irene Martini
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2017000091226 2017.08.07
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/02 ; H04N23/57 ; H04N23/67

Abstract:
A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
Public/Granted literature
- US20210206625A1 MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR Public/Granted day:2021-07-08
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