Invention Grant
- Patent Title: Charged particle optical device, objective lens assembly, detector, detector array, and methods
-
Application No.: US17559950Application Date: 2021-12-22
-
Publication No.: US11821859B2Publication Date: 2023-11-21
- Inventor: Marco Jan-Jaco Wieland , Albertus Victor Gerardus Mangnus
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: EP 216927 2020.12.23 EP 174518 2021.05.18 EP 191729 2021.08.17
- Main IPC: G01N23/2251
- IPC: G01N23/2251 ; G01N23/203 ; H01J37/10 ; H01J37/244
Abstract:
The embodiments of the present disclosure provide various techniques for detecting backscatter charged particles, including accelerating charged particle sub-beams along sub-beam paths to a sample, repelling secondary charged particles from detector arrays, and providing devices and detectors which can switch between modes for primarily detecting charged particles and modes for primarily detecting secondary particles.
Public/Granted literature
- US20220196581A1 CHARGED PARTICLE OPTICAL DEVICE, OBJECTIVE LENS ASSEMBLY, DETECTOR, DETECTOR ARRAY, AND METHODS Public/Granted day:2022-06-23
Information query
