- 专利标题: Waveform generating device, waveform generating method, and charged particle beam irradiation apparatus
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申请号: US17646067申请日: 2021-12-27
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公开(公告)号: US11837436B2公开(公告)日: 2023-12-05
- 发明人: Michihiko Ikeda , Akinori Mine , Kuniaki Kawahara
- 申请人: NuFlare Technology, Inc.
- 申请人地址: JP Yokohama
- 专利权人: NuFlare Technology, Inc.
- 当前专利权人: NuFlare Technology, Inc.
- 当前专利权人地址: JP Yokohama
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP 21016707 2021.02.04
- 主分类号: H01J37/302
- IPC分类号: H01J37/302 ; H03M1/06 ; H01J37/147
摘要:
In one embodiment, a waveform generating device includes a first DA converter converting input data, a controller outputting a first signal having a command value based on the input data, and a second signal having a command value differing by a constant value from the first signal, a second DA converter converting the first signal, a third DA converter converting the second signal, and a combiner combining the output of the first DA converter, the output of the second DA converter, and the output of the third DA converter. When a value of a predetermined first high-order bit of the input data is inverted, the controller changes the command value of the first signal such that a value of the first high-order bit or a second high-order bit different from the first high-order bit is inverted.
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