Invention Grant
- Patent Title: O-ring seals for fluid sensing
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Application No.: US16932128Application Date: 2020-07-17
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Publication No.: US11837513B2Publication Date: 2023-12-05
- Inventor: Sebastian Meier , Bernhard Peter Lange
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Dawn Jos; Frank D. Cimino
- Main IPC: H01L23/10
- IPC: H01L23/10 ; H01L23/053 ; H01L23/16 ; H01L21/56 ; G01N27/28 ; G01N27/416 ; H01L23/00
Abstract:
In some examples, a device comprises a substrate including a notch formed in a surface of the substrate and a semiconductor die positioned in the notch and including an electrochemical sensor on an active surface of the semiconductor die. The device also comprises a chemically inert member abutting the surface of the substrate and including an orifice in vertical alignment with the electrochemical sensor as a result of the semiconductor die being positioned in the notch. The device also comprises a compressed o-ring seal positioned between the chemically inert member and the active surface of the semiconductor die, the compressed o-ring seal circumscribing the electrochemical sensor.
Public/Granted literature
- US20210020528A1 O-RING SEALS FOR FLUID SENSING Public/Granted day:2021-01-21
Information query
IPC分类:
