Invention Grant
- Patent Title: Optical pulse stretcher, laser device, and electronic device manufacturing method
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Application No.: US17572185Application Date: 2022-01-10
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Publication No.: US11837839B2Publication Date: 2023-12-05
- Inventor: Hirotaka Miyamoto
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/00
- IPC: H01S3/00 ; G02B17/02 ; G02B17/06 ; G03F7/00 ; H01S3/23

Abstract:
An optical pulse stretcher includes a first delay optical system including a plurality of concave toroidal mirrors; and a beam splitter including a first surface and a second surface, causing a part of pulse laser light incident on the first surface to be transmitted in a first direction and output as a first beam and another part thereof to be reflected in a second direction and enter the first delay optical system, and causing a part of pulse laser light incident on the second surface from the first delay optical system to be reflected in the first direction and output as a second beam.
Public/Granted literature
- US20220131328A1 OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-04-28
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