- 专利标题: Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method
-
申请号: US17891015申请日: 2022-08-18
-
公开(公告)号: US11839944B2公开(公告)日: 2023-12-12
- 发明人: Wule Zhu , Fang Han , Lu Wu , Anyu Sun , Bingfeng Ju
- 申请人: ZHEJIANG UNIVERSITY
- 申请人地址: CN Hangzhou
- 专利权人: ZHEJIANG UNIVERSITY
- 当前专利权人: ZHEJIANG UNIVERSITY
- 当前专利权人地址: CN Hangzhou
- 主分类号: B24B1/04
- IPC分类号: B24B1/04 ; B24B41/04 ; B24B35/00 ; B06B3/02 ; B24B13/01
摘要:
A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.
公开/授权文献
信息查询