Invention Grant
- Patent Title: Closed-loop position control of MEMS micromirrors
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Application No.: US17109929Application Date: 2020-12-02
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Publication No.: US11841497B2Publication Date: 2023-12-12
- Inventor: Paolo Frigerio , Giacomo Langfelder , Luca Molinari , Giuseppe Maiocchi , Andrea Barbieri
- Applicant: Politecnico Di Milano , STMicroelectronics S.r.l.
- Applicant Address: IT Milan
- Assignee: Politecnico Di Milano,STMicroelectronics S.r.l.
- Current Assignee: Politecnico Di Milano,STMicroelectronics S.r.l.
- Current Assignee Address: IT Milan; IT Agrate Brianza
- Agency: CROWE & DUNLEVY
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H04N9/31 ; G09G3/02 ; G05B5/01 ; H03G1/00

Abstract:
Disclosed herein is a control system for a projection system, including a first subtractor receiving an input drive signal and a feedback signal and generating a first difference signal therefrom, the feedback signal being indicative of position of a quasi static micromirror of the projection system. A type-2 compensator receives the first difference signal and generates therefrom a first output signal. A derivative based controller receives the feedback signal and generates therefrom a second output signal. A second subtractor receives the first and second output signals and generates a second difference signal therefrom. The second difference signal serves to control a mirror driver of the projection system. A higher order resonance equalization circuit receives a pre-output signal from an analog front end of the projection system that is indicative of position of the quasi static micromirror, and generates the feedback signal therefrom.
Public/Granted literature
- US20220171180A1 CLOSED-LOOP POSITION CONTROL OF MEMS MICROMIRRORS Public/Granted day:2022-06-02
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