Holding apparatus, control system and inspection system
摘要:
According to one embodiment, a holding apparatus holds a moving body and changes a position of the moving body in a second direction perpendicular to a surface of a columnar body. The surface of the columnar body extends in the first direction. The moving body is movable along the first direction. The apparatus includes first and second holders separated from each other. The first holder includes first and second portions separated from each other, and a third portion. The second holder includes fourth and fifth portions separated from each other, and a sixth portion. The moving body is held by the first and second holders in a state in which the moving body is at a hold position. The hold position is where the moving body opposes the third and sixth portions and is between the first and second portions and between the fourth and fifth portions.
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