Invention Grant
- Patent Title: Method for fabricating memory cell of magnetoresistive random access memory
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Application No.: US17573641Application Date: 2022-01-12
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Publication No.: US11849649B2Publication Date: 2023-12-19
- Inventor: Da-Jun Lin , Bin-Siang Tsai , Ting-An Chien
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- The original application number of the division: US16656304 2019.10.17
- Main IPC: H10N50/80
- IPC: H10N50/80 ; H10N50/01 ; H10N50/85

Abstract:
A method for fabricating memory cell of magnetoresistive RAM includes forming a memory stack structure on a first electrode layer. The memory stack structure includes a SAF layer to serve as a pinned layer; a magnetic free layer and a barrier layer sandwiched between the SAF layer and the magnetic free layer. A second electrode layer is then formed on the memory stack structure. The SAF layer includes a first magnetic layer, a second magnetic layer, and a spacer layer of a first metal element sandwiched between the first magnetic layer and the second magnetic layer. The first metal element is phase separated from a second metal element of the first and second magnetic layers, and the second metal element of the first magnetic layer and the second magnetic layer interfaces with the spacer layer.
Public/Granted literature
- US20220140229A1 METHOD FOR FABRICATING MEMORY CELL OF MAGNETORESISTIVE RANDOM ACCESS MEMORY Public/Granted day:2022-05-05
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