Invention Grant
- Patent Title: Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process
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Application No.: US17241086Application Date: 2021-04-27
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Publication No.: US11851597B2Publication Date: 2023-12-26
- Inventor: Yu-Ning Chen , Ming-Che Chung
- Applicant: eChem Solutions Corp.
- Applicant Address: TW Taoyuan
- Assignee: eChem Solutions Corp.
- Current Assignee: eChem Solutions Corp.
- Current Assignee Address: TW Taoyuan
- Agency: JCIPRNET
- Priority: TW 9117963 2020.05.29
- Main IPC: C09K13/02
- IPC: C09K13/02 ; C08J7/12

Abstract:
An etchant composition, a tackifier, an alkaline solution, a method of removing polyimide and an etching process are provided. The etchant composition includes a tackifier (A) and an alkaline solution (B). The tackifier (A) includes a resin containing a hydroxyl group (a), a surfactant (b) and a first solvent (c1). The alkaline solution (B) includes an alkaline compound (d) and a second solvent (c2).
Public/Granted literature
- US20210371747A1 ETCHANT COMPOSITION, TACKIFIER, ALKALINE SOLUTION, METHOD OF REMOVING POLYIMIDE AND ETCHING PROCESS Public/Granted day:2021-12-02
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