- 专利标题: Vibrationally isolated cryogenic shield for local high-quality vacuum
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申请号: US17449578申请日: 2021-09-30
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公开(公告)号: US11853849B2公开(公告)日: 2023-12-26
- 发明人: Jason Madjdi Amini
- 申请人: IonQ, Inc.
- 申请人地址: US MD College Park
- 专利权人: IonQ, Inc.
- 当前专利权人: IonQ, Inc.
- 当前专利权人地址: US MD College Park
- 代理机构: ARENTFOX SCHIFF LLP
- 分案原申请号: US16242328 2019.01.08
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; G06N10/00 ; F04B15/08 ; F25D19/00 ; B82Y10/00
摘要:
The disclosure describes various aspects of a vibrationally isolated cryogenic shield for local high-quality vacuum. More specifically, the disclosure describes a cryogenic vacuum system replicated in a small volume in a mostly room temperature ultra-high vacuum (UHV) system by capping the volume with a suspended cryogenic cold finger coated with a high surface area sorption material to produce a localized extreme high vacuum (XHV) or near-XHV region. The system is designed to ensure that all paths from outgassing materials to the control volume, including multiple bounce paths off other warm surfaces, require at least one bounce off of the high surface area sorption material on the cold finger. The outgassing materials can therefore be pumped before reaching the control volume. To minimize vibrations, the cold finger is only loosely, mechanically connected to the rest of the chamber, and the isolated along with the cryogenic system via soft vacuum bellows.
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