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公开(公告)号：US11512687B2
公开(公告)日：2022-11-29
申请号：US16533117
申请日：2019-08-06
发明人： Kakeru Takahashi
摘要： A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes axially arranged cryopanels including a top cryopanel disposed closest to the cryopump intake port, and a top cryopanel accommodation cryopanel which is thermally coupled to the high-temperature cooling stage and is disposed in the cryopump intake port to form a top cryopanel accommodation compartment.
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公开(公告)号：US20220208398A1
公开(公告)日：2022-06-30
申请号：US17521449
申请日：2021-11-08
发明人： Alan Van Drie
IPC分类号： G21B1/15 , F04B37/08 , F04B37/14 , G21B1/05 , G21B1/17 , G21B1/19 , H05H1/08 , H05H1/14 , H05H1/16
摘要： Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.
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公开(公告)号：US20220106949A1
公开(公告)日：2022-04-07
申请号：US17493418
申请日：2021-10-04
发明人： Kakeru Takahashi
摘要： A cryopump includes a cryocooler; a cryopanel cooled by the cryocooler; a cryopump container supporting the cryocooler and accommodating the cryopanel; a temperature sensor that measures a temperature of the cryopanel and outputs a measured temperature signal indicating the temperature; a pressure sensor that measures an internal pressure of the cryopump container and outputs a measured pressure signal indicating the internal pressure; a pressure rise rate comparator that compares a pressure rise rate of the cryopump container with a first pressure rise rate threshold; and a cryocooler controller that controls the cryocooler to lower the temperature of the cryopanel. The pressure rise rate comparator compares the pressure rise rate of the cryopump container with a second pressure rise rate threshold. The second pressure region is lower than the first pressure region. The second pressure rise rate threshold is smaller than the first pressure rise rate threshold.
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公开(公告)号：US20220093280A1
公开(公告)日：2022-03-24
申请号：US17519089
申请日：2021-11-04
IPC分类号： G21B1/15 , G21B1/05 , G21B1/19 , H05H1/16 , H05H1/08 , H05H1/14 , F04B37/14 , G21B1/17 , F04B37/08
摘要： Systems and methods are provided that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing neutral beam injectors with tunable beam energy capabilities.
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公开(公告)号：US11047374B2
公开(公告)日：2021-06-29
申请号：US16102727
申请日：2018-08-14
发明人： Ken Oikawa
摘要： A cryopump includes a cryopump flange for attachment to the flange on a gate valve, and an annular baffle that axially extends toward the gate valve from the cryopump flange such that the annular baffle forms an annular orifice in association with a valve plate component of the gate valve. The annular orifice may be defined between an upper surface of the annular baffle and the valve plate.
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公开(公告)号：US20210190057A1
公开(公告)日：2021-06-24
申请号：US17193682
申请日：2021-03-05
发明人： Kakeru Takahashi
IPC分类号： F04B37/08
摘要： A cryopump includes a cryopanel assembly which includes an exposed area that a gas to be pumped can linearly reach through a cryopump intake port and a non-exposed area that the gas to be pumped cannot linearly reach through the cryopump intake port, in which the non-exposed area has an adsorption area capable of adsorbing a non-condensable gas, and the exposed area is covered with a removable protective surface.
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公开(公告)号：US10815982B2
公开(公告)日：2020-10-27
申请号：US14547665
申请日：2014-11-19
发明人： Takaaki Matsui
IPC分类号： F04B37/08
摘要： A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5.
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公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
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公开(公告)号：US20190316574A1
公开(公告)日：2019-10-17
申请号：US16427374
申请日：2019-05-31
发明人： Mingyao XU , Qian BAO , Takaaki MORIE
摘要： A GM cryocooler includes a first cold head including a first displacer that is reciprocable in an axial direction, a first drive piston that drives the first displacer in the axial direction, and a first drive chamber that houses the first drive piston; a second cold head including a second displacer that is reciprocable in the axial direction, and a second cylinder that houses the second displacer; a first intake valve that is connected to both the first drive chamber and the second cylinder so as to supply working gas in parallel to the first drive chamber and the second cylinder; and a first exhaust valve that is connected to both the first drive chamber and the second cylinder so as to collect the working gas in parallel from the first drive chamber and the second cylinder.
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公开(公告)号：US10273949B2
公开(公告)日：2019-04-30
申请号：US15422878
申请日：2017-02-02
发明人： Kakeru Takahashi
摘要： A method of operating a cryopump includes: cooling a cryopanel from an initial temperature higher than a cryogenic temperature for a vacuum pumping operation to the cryogenic temperature by using a refrigerator; and after the cooling, initiating the vacuum pumping operation, in which the cooling includes providing a cooling relief effect selectively to a high-temperature stage of the refrigerator.
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