Invention Grant
- Patent Title: STIM/liquid metal filled laser drill trench to improve cooling of stacked bottom die
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Application No.: US16721807Application Date: 2019-12-19
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Publication No.: US11854931B2Publication Date: 2023-12-26
- Inventor: Zhimin Wan , Chia-Pin Chiu , Peng Li , Shankar Devasenathipathy
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L25/065 ; H01L23/42 ; H01L23/373 ; H01L23/538 ; H01L25/00 ; H01L21/56 ; H01L21/48 ; H01L23/00

Abstract:
Embodiments include semiconductor packages and a method to form such packages. A semiconductor package includes first and second bottom dies on a package substrate. The semiconductor package includes first top dies on the first bottom die, second top dies on the second bottom die, and a pedestal on the first and second bottom dies. The pedestal comprises a high thermal conductive material and is positioned on a region of top surfaces of the first and second bottom dies. The semiconductor package includes an encapsulation layer over the first and second bottom dies, and surrounds the first and second top dies and the pedestal. The semiconductor package includes a TIM over the first and second top dies, pedestal, and encapsulation layer, and an integrated heat spreader (IHS) over the TIM. The pedestal is on a periphery region of the top surfaces of the first and second bottom dies.
Public/Granted literature
- US20210193548A1 STIM/LIQUID METAL FILLED LASER DRILL TRENCH TO IMPROVE COOLING OF STACKED BOTTOM DIE Public/Granted day:2021-06-24
Information query
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