Invention Grant
- Patent Title: Interferometer movable mirror position measurement apparatus and fourier transform infrared spectroscopy
-
Application No.: US17269296Application Date: 2018-09-03
-
Publication No.: US11860037B2Publication Date: 2024-01-02
- Inventor: Takashi Muramatsu
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: Sughrue Mion, PLLC
- International Application: PCT/JP2018/032655 2018.09.03
- International Announcement: WO2020/049620A 2020.03.12
- Date entered country: 2021-02-18
- Main IPC: G01J3/45
- IPC: G01J3/45 ; G01B9/02 ; G01B11/14

Abstract:
An interferometer movable mirror position measurement apparatus for determining a position of a movable mirror of an interferometer. The interferometer movable mirror position measurement apparatus including: a laser light source; a phase separation optical system configured to make first light and second light separately detected; a signal conversion unit configured to detect the first light and the second light in synchronization with a position of a movable mirror to generate a first sinusoidal wave signal and a second sinusoidal wave signal, respectively; a phase calculation unit configured to perform normalization and phase difference correction on each of the first sinusoidal wave signal and the second sinusoidal wave signal, and then calculate a phase of the first sinusoidal wave signal or the second sinusoidal wave signal at each time point; and a movable mirror position determination unit configured to determine a position of the movable mirror at a predetermined time point.
Public/Granted literature
- US20210190590A1 INTERFEROMETER MOVABLE MIRROR POSITION MEASUREMENT APPARATUS AND FOURIER TRANSFORM INFRARED SPECTROSCOPY Public/Granted day:2021-06-24
Information query