- Patent Title: NAND flash block architecture enhancement to prevent block lifting
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Application No.: US16984962Application Date: 2020-08-04
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Publication No.: US11862573B2Publication Date: 2024-01-02
- Inventor: Martin Jared Barclay , Mark Tunik
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Greenberg Traurig
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/535 ; H01L21/768 ; H10B20/00 ; H10B41/10 ; H10B41/27 ; H10B41/50 ; H10B43/10 ; H10B43/27 ; H10B43/50

Abstract:
Disclosed is a three-dimensional memory device. In one embodiment, a device is disclosed comprising a source plate; plugs fabricated fabricated on or partially formed in the source plate; a stack formed on the substrate and plugs comprising alternating insulating layers and conductive layers and channel-material strings of memory cells extending through the insulating layers and conductive layers; a first set of pillars extending through the stack formed by a process including etching the alternating insulating layers and conductive layers and depositing a pillar material therein, wherein each pillar in the first set of pillars terminates atop a respective plug in the plurality of plugs; and a second set of pillars extending through the stack formed by a process including etching the alternating insulating layers and conductive layers and depositing a pillar material therein, wherein each pillar in the second set of pillars terminates in the source plate.
Information query
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