Invention Grant
- Patent Title: Multispectral imaging sensor provided with means for limiting crosstalk
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Application No.: US17264166Application Date: 2019-07-29
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Publication No.: US11862658B2Publication Date: 2024-01-02
- Inventor: Stephane Tisserand , Laurent Roux , Marc Hubert , Vincent Sauget
- Applicant: SILIOS TECHNOLOGIES
- Applicant Address: FR Rousset
- Assignee: SILIOS TECHNOLOGIES
- Current Assignee: SILIOS TECHNOLOGIES
- Current Assignee Address: FR Rousset
- Agency: Sughrue Mion, PLLC
- Priority: FR 00822 2018.07.30
- International Application: PCT/FR2019/051864 2019.07.29
- International Announcement: WO2020/025888A 2020.02.06
- Date entered country: 2021-01-28
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N25/75 ; H04N25/60 ; H04N23/11

Abstract:
A hybrid multispectral imaging sensor, characterized in that it comprises a photosensitive backside-illumination detector (DET) that is made on a substrate (100) made of InP, and that is formed of a matrix of pixels (105, P1, P2, P3) that are themselves made in a structure based on InGaAs (103), and a filter module (MF) that is formed of a matrix of elementary filters (λ1, λ2, λ3) reproducing said matrix of pixels, and that is mounted into contact with said substrate (100), said substrate (100) made of InP having a thickness less than 50 μm, and preferably less than 30 μm.
Public/Granted literature
- US20210288087A1 MULTISPECTRAL IMAGING SENSOR PROVIDED WITH MEANS FOR LIMITING CROSSTALK Public/Granted day:2021-09-16
Information query
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