Invention Grant
- Patent Title: MEMS device
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Application No.: US17484115Application Date: 2021-09-24
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Publication No.: US11863933B2Publication Date: 2024-01-02
- Inventor: Niccoló De Milleri , Christian Bretthauer , Alessandro Caspani , Alessandra Fusco
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP 208986 2020.11.20
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B7/00

Abstract:
A MEMS device includes a MEMS sound transducer, and control circuitry. The control circuitry includes a supply signal provider for providing a high-level supply signal and read-out circuitry for receiving an output signal from the MEMS sound transducer, and a switching arrangement for selectively connecting the MEMS sound transducer to the supply signal provider, and for selectively connecting the MEMS sound transducer to the read-out circuitry based on a control signal. The control circuitry provides the control signal having an ultrasonic actuation pattern to the switching arrangement during a first condition TX of the control signal, wherein the ultrasonic actuation pattern of the control signal triggers the switching arrangement for alternately coupling the high-level supply signal to the MEMS sound transducer.
Public/Granted literature
- US20220167095A1 MEMS Device Public/Granted day:2022-05-26
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