In a polymeric microfluidic valve, an adhesion control surface with discrete micro- or nano-scale structured surfaces are separated by fluid filled voids at an interface between an elastomeric membrane seals against a substrate layer. The structured surfaces reduce adhesion between the membrane layer and the substrate layer and prevent permanent bonding, while at the same time providing a good balance of adhesion at the valve seat to provide a sealing engagement. Microstructured adhesion control surfaces on and around valve bodies permit opening the valve, by reducing contact surface area.