- Patent Title: Master stamp for nano imprint and method for manufacturing the same
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Application No.: US16504806Application Date: 2019-07-08
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Publication No.: US11868042B2Publication Date: 2024-01-09
- Inventor: Seung-won Park , Yunjong Yeo , Sanghoon Lee , Daehwan Jang , Incheol Jeong , Hyungbin Cho
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR 20180103601 2018.08.31
- Main IPC: G03F7/00
- IPC: G03F7/00 ; B82Y40/00 ; B29C59/02 ; G02B5/30 ; G02F1/1335 ; B82Y10/00

Abstract:
A stamp for nano imprinting includes a base substrate, a first pattern part and a second pattern part disposed on the base substrate and having different widths, and a third pattern part and a fourth pattern part having different widths. Each of the first pattern part to the fourth pattern part includes a plurality of nano patterns, and the first pattern part and the second pattern part and the third pattern part and the fourth pattern are disposed to be arranged adjacent to each other in a sequential order in the first direction.
Public/Granted literature
- US20200073235A1 MASTER STAMP FOR NANO IMPRINT AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2020-03-05
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