公开(公告)号：US11868042B2

公开(公告)日：2024-01-09

申请号：US16504806

申请日：2019-07-08

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-won Park ,  Yunjong Yeo ,  Sanghoon Lee ,  Daehwan Jang ,  Incheol Jeong ,  Hyungbin Cho

IPC: G03F7/00 ,  B82Y40/00 ,  B29C59/02 ,  G02B5/30 ,  G02F1/1335 ,  B82Y10/00

CPC classification number: G03F7/0002 ,  G02B5/3058 ,  G02F1/133528 ,  B29C59/022 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00

Abstract: A stamp for nano imprinting includes a base substrate, a first pattern part and a second pattern part disposed on the base substrate and having different widths, and a third pattern part and a fourth pattern part having different widths. Each of the first pattern part to the fourth pattern part includes a plurality of nano patterns, and the first pattern part and the second pattern part and the third pattern part and the fourth pattern are disposed to be arranged adjacent to each other in a sequential order in the first direction.