- 专利标题: Ultrasonic water jet apparatus including piezoelectric vibration plate
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申请号: US16910444申请日: 2020-06-24
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公开(公告)号: US11872581B2公开(公告)日: 2024-01-16
- 发明人: Xiaoming Qiu
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Greer, Burns & Crain, Ltd.
- 优先权: JP 19123614 2019.07.02
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; B05B17/06 ; H01L21/67 ; B05B17/00 ; H01L21/687 ; B08B3/12
摘要:
An ultrasonic water jet apparatus includes a water accumulation part in which the water supplied from a water supply source is temporarily accumulated, a jet port that jets the water accumulated in the water accumulation part, and a piezoelectric vibration plate including a dome part that is disposed opposed to the jet port in the water accumulation part and propagates the ultrasonic vibration to the water accumulated in the water accumulation part, a flange part that projects outward in the radial direction from a peripheral edge of the dome part, and an annular plate that projects outward in the radial direction from a peripheral edge of the flange part.
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