Invention Grant
- Patent Title: Vortex beam-excited precision grating displacement measurement apparatus and measurement method
-
Application No.: US17993362Application Date: 2022-11-23
-
Publication No.: US11874475B2Publication Date: 2024-01-16
- Inventor: Guoyong Ye , Yalin Zhang , Tao Yuan , Shaobo Jin , Tong Wang , Xuling Liu , Hui Wang
- Applicant: ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY
- Applicant Address: CN Zhengzhou
- Assignee: ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY
- Current Assignee: ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY
- Current Assignee Address: CN Zhengzhou
- Agency: Troutman Pepper Hamilton Sanders LLP (Rochester)
- Priority: CN 2210494629.0 2022.05.07
- Main IPC: G02B27/09
- IPC: G02B27/09 ; G02B27/10 ; G01B11/02

Abstract:
A vortex beam-excited precision grating displacement measurement apparatus, which performs displacement measurement by taking a vortex beam carrying topological charges as an excitation light source of a grating and by using the interference of a ±m-order diffracted vortex beam. In the vortex beam-excited precision grating displacement measurement method and apparatus, the displacement p/m of the measured displacement corresponds to the rotation of a circle 2π rad of an interference petal pattern, and then the rotation of 1° of the interference petal pattern corresponds to the measured displacement amount of p/360m. Compared with a conventional grating measurement method, the present disclosure provides a grating interference sensing signal that realizes a higher optical subdivision rate itself.
Public/Granted literature
- US20230359049A1 VORTEX BEAM-EXCITED PRECISION GRATING DISPLACEMENT MEASUREMENT APPARATUS AND MEASUREMENT METHOD Public/Granted day:2023-11-09
Information query