Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17047724Application Date: 2019-04-16
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Publication No.: US11881513B2Publication Date: 2024-01-23
- Inventor: Kosei Nei , Tsutomu Murakawa , Toshihiko Takeuchi , Kentaro Sugaya
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP 18086578 2018.04.27
- International Application: PCT/IB2019/053094 2019.04.16
- International Announcement: WO2019/207410A 2019.10.31
- Date entered country: 2020-10-15
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L29/00 ; H01L29/24 ; H01L27/12 ; H10B12/00

Abstract:
A semiconductor device that can be scaled down or highly integrated is provided. The semiconductor device includes a first layer and a second layer over the first layer. The first layer and the second layer each include a transistor. The transistor in the first layer and the transistor in the second layer each include a first oxide, a first conductor and a second conductor over the first oxide, a first insulator placed to cover the first conductor, the second conductor, and the first oxide, a second insulator over the first insulator, a second oxide placed between the first conductor and the second conductor over the first oxide, a third insulator over the second oxide, a third conductor over the third insulator, and a fourth insulator in contact with a top surface of the second insulator, a top surface of the second oxide, a top surface of the third insulator, and a top surface of the third conductor. The first insulator and the fourth insulator are less likely than the second insulator to allow oxygen to pass through.
Public/Granted literature
- US20210167174A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-06-03
Information query
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