- Patent Title: Method of forming semiconductor memory device having saddle portion
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Application No.: US17561663Application Date: 2021-12-23
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Publication No.: US11882683B2Publication Date: 2024-01-23
- Inventor: Chien-Ming Lu , Fu-Che Lee , Chien-Cheng Tsai , Chiu-Fang Hsu
- Applicant: UNITED MICROELECTRONICS CORP. , Fujian Jinhua Integrated Circuit Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee: UNITED MICROELECTRONICS CORP.,Fujian Jinhua Integrated Circuit Co., Ltd.
- Current Assignee Address: TW Hsin-Chu; CN Quanzhou
- Agent Winston Hsu
- Priority: CN 1710192623.7 2017.03.28
- The original application number of the division: US15910015 2018.03.02
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/311 ; H01L21/762 ; H01L21/02 ; H01L29/06 ; H01L21/3065

Abstract:
A method of forming a semiconductor memory device, the semiconductor memory device includes a plurality of active areas, a shallow trench isolation, a plurality of trenches and a plurality of gates. The active areas are defined on a semiconductor substrate, and surrounded by the shallow trench isolation. The trenches are disposed in the semiconductor substrate, penetrating through the active areas and the shallow trench isolation, wherein each of the trenches includes a bottom surface and a saddle portion protruded therefrom in each active areas. The gates are disposed in the trenches respectively.
Public/Granted literature
- US20220122988A1 METHOD OF FORMING SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-04-21
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