Invention Grant
- Patent Title: Fluid ejection device with reduced number of components, and method for manufacturing the fluid ejection device
-
Application No.: US17572374Application Date: 2022-01-10
-
Publication No.: US11884071B2Publication Date: 2024-01-30
- Inventor: Domenico Giusti , Carlo Luigi Prelini , Lorenzo Tentori
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2019000005794 2019.04.15
- The original application number of the division: US16848549 2020.04.14
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/165

Abstract:
Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.
Public/Granted literature
Information query
IPC分类: