Invention Grant
- Patent Title: Susceptor with ring to limit backside deposition
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Application No.: US17395240Application Date: 2021-08-05
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Publication No.: US11885019B2Publication Date: 2024-01-30
- Inventor: Mark Hawkins , Matthew G. Goodman , Shawn Thomas
- Applicant: ASM IP HOLDING B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Banner & Witcoff, Ltd.
- The original application number of the division: US13284231 2011.10.28
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/687 ; C23C16/458 ; H01L21/67
Abstract:
A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.
Public/Granted literature
- US20210363637A1 SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION Public/Granted day:2021-11-25
Information query
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