- 专利标题: Imaging type X-ray microscope
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申请号: US17501378申请日: 2021-10-14
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公开(公告)号: US11885753B2公开(公告)日: 2024-01-30
- 发明人: Kazuhiko Omote , Raita Hirose , Shuichi Kato , Yuriy Platonov
- 申请人: Rigaku Corporation
- 申请人地址: JP Tokyo
- 专利权人: Rigaku Corporation
- 当前专利权人: Rigaku Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: ASLAN LAW, P.C.
- 优先权: JP 20178363 2020.10.23
- 主分类号: G01N23/04
- IPC分类号: G01N23/04
摘要:
An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.
公开/授权文献
- US20220128487A1 IMAGING TYPE X-RAY MICROSCOPE 公开/授权日:2022-04-28
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