Invention Grant
- Patent Title: Memory cell including polarization retention member(s) including antiferroelectric layer over ferroelectric layer
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Application No.: US17237886Application Date: 2021-04-22
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Publication No.: US11889701B2Publication Date: 2024-01-30
- Inventor: Tarek Ali , Konstantin H. J. Mertens , Maximilian W. Lederer , David J. Lehninger , Konrad Seidel
- Applicant: GLOBALFOUNDRIES Dresden Module One Limited Liability Company & Co. KG
- Applicant Address: DE Dresden
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Yee Tze Lim
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H10B53/30 ; H01L49/02 ; H01L29/78 ; H01L29/51 ; H10B51/30

Abstract:
Memory cells include various versions of a capacitor structure including a polarization retention member. Each polarization retention member includes an antiferroelectric layer over a ferroelectric layer. The antiferroelectric layer, among other layers, can be tailored to customize the hysteresis loop shape, and the coercive electric field required to change polarization of the memory cell. Metal electrodes, and/or dielectric or metallic interlayers may also be employed to tailor the hysteresis. The memory cells can include FeRAMs or FeFETs. The memory cells provide a lower coercive electric field requirement compared to conventional ferroelectric memory cells, enhanced reliability, and require minimum changes to integrate into current integrated circuit fabrication processes.
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