Invention Grant
- Patent Title: Processing apparatus
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Application No.: US17453073Application Date: 2021-11-01
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Publication No.: US11890711B2Publication Date: 2024-02-06
- Inventor: Takafumi Omori
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP 20192688 2020.11.19
- Main IPC: B23Q15/22
- IPC: B23Q15/22 ; G05B19/409 ; H01L21/67

Abstract:
There is provided a processing apparatus including a holding table having a holding surface for holding thereon a workpiece with a plurality of devices formed in respective areas demarcated on a face side of the workpiece by a plurality of projected dicing lines, a processing unit that processes the workpiece held on the holding table, an image capturing unit that captures an image of the workpiece held on the holding table, a moving unit that moves the holding table relatively to the processing unit and the image capturing unit in horizontal directions along the holding surface, a touch panel that displays thereon the image captured by the image capturing unit, and a control unit. The control unit detects a line in an image positioned within an allowable region based on a contact line traced on the image displayed on the touch panel and registers the detected line.
Public/Granted literature
- US20220152768A1 PROCESSING APPARATUS Public/Granted day:2022-05-19
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