Invention Grant
- Patent Title: Apparatus for supplying chemical liquid
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Application No.: US17366322Application Date: 2021-07-02
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Publication No.: US11890864B2Publication Date: 2024-02-06
- Inventor: Inseok Ha , Jinhyuck Yang , Jaeyoung Jang
- Applicant: SEMES CO., LTD
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD
- Current Assignee: SEMES CO., LTD
- Current Assignee Address: KR Cheonan-si
- Agency: DALY, CROWLEY, MOFFORD & DURKEE, LLP
- Priority: KR 20200083381 2020.07.07
- Main IPC: B41J11/00
- IPC: B41J11/00 ; B05B7/06 ; B05B13/02 ; H01L21/683

Abstract:
An apparatus for supplying a chemical liquid may include a stage on which a substrate is placed, a chemical liquid discharging member and a direction changing member. The chemical liquid discharging member may supply the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction. Additionally, the chemical liquid discharging member may supply the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction. The direction changing member may change a direction of the substrate from the second direction to the first direction.
Public/Granted literature
- US20220009249A1 Apparatus for Supplying Chemical Liquid Public/Granted day:2022-01-13
Information query
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