公开(公告)号：US11890864B2

公开(公告)日：2024-02-06

申请号：US17366322

申请日：2021-07-02

Applicant: SEMES CO., LTD

Inventor： Inseok Ha ,  Jinhyuck Yang ,  Jaeyoung Jang

IPC: B41J11/00 ,  B05B7/06 ,  B05B13/02 ,  H01L21/683

CPC classification number: B41J11/0085 ,  B05B7/061 ,  B05B13/02 ,  H01L21/6838

Abstract: An apparatus for supplying a chemical liquid may include a stage on which a substrate is placed, a chemical liquid discharging member and a direction changing member. The chemical liquid discharging member may supply the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction. Additionally, the chemical liquid discharging member may supply the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction. The direction changing member may change a direction of the substrate from the second direction to the first direction.

公开(公告)号：US20220009249A1

公开(公告)日：2022-01-13

申请号：US17366322

申请日：2021-07-02

Applicant: SEMES CO., LTD

Inventor： Inseok Ha ,  Jinhyuck Yang ,  Jaeyoung Jang

IPC: B41J11/00 ,  H01L21/683

Abstract: An apparatus for supplying a chemical liquid may include a stage on which a substrate is placed, a chemical liquid discharging member and a direction changing member. The chemical liquid discharging member may supply the chemical liquid onto at least two first regions of the substrate for first pixels along a first direction. Additionally, the chemical liquid discharging member may supply the chemical liquid onto at least two second regions of the substrate for second pixels along a second direction. The direction changing member may change a direction of the substrate from the second direction to the first direction.