Invention Grant
- Patent Title: Accelerometer with translational motion of masses
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Application No.: US17555002Application Date: 2021-12-17
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Publication No.: US11892467B2Publication Date: 2024-02-06
- Inventor: Kemiao Jia , Xin Zhang , Michael Judy
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P1/00

Abstract:
A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.
Public/Granted literature
- US20220196699A1 ACCELEROMETER WITH TRANSLATIONAL MOTION OF MASSES Public/Granted day:2022-06-23
Information query
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