Invention Grant
- Patent Title: Stud attachment device and stud attachment method with independent temperature/pressure control
-
Application No.: US17211165Application Date: 2021-03-24
-
Publication No.: US11892767B2Publication Date: 2024-02-06
- Inventor: Byungchul Yoo , Sunghoon Park , Mun Ja Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200126477 2020.09.29
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F7/00
Abstract:
A stud attachment device for attaching a plurality of studs to a photomask constituting a reticle. The stud attachment device including a body; a plurality of holders extending from the body, the holders allowing the studs to be laid thereon, respectively; and a pressure regulator for independently controlling pressures of the holders when the studs are attached to the photomask.
Public/Granted literature
- US20220100076A1 STUD ATTACHMENT DEVICE AND STUD ATTACHMENT METHOD WITH INDEPENDENT TEMPERATURE/PRESSURE CONTROL Public/Granted day:2022-03-31
Information query
