Invention Grant
- Patent Title: Linear accelerator assembly including flexible high-voltage connection
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Application No.: US17502279Application Date: 2021-10-15
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Publication No.: US11895766B2Publication Date: 2024-02-06
- Inventor: David T. Blahnik , Charles T. Carlson , Robert B. Vopat , Frank Sinclair , Paul J. Murphy , Krag R. Senior
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW Firm PLLC
- Main IPC: H05H7/22
- IPC: H05H7/22
Abstract:
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.
Public/Granted literature
- US20230120769A1 LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION Public/Granted day:2023-04-20
Information query
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