- 专利标题: Vertical non-volatile memory devices having a multi-stack structure with enhanced photolithographic alignment characteristics
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申请号: US17469469申请日: 2021-09-08
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公开(公告)号: US11895827B2公开(公告)日: 2024-02-06
- 发明人: Giyong Chung , Youngjin Kwon , Dongseog Eun
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Myers Bigel, P.A.
- 优先权: KR 20200181182 2020.12.22
- 主分类号: H10B12/00
- IPC分类号: H10B12/00
摘要:
A vertical-type nonvolatile memory device has a multi-stack structure with reduced susceptibility to mis-alignment of a vertical channel layer. This nonvolatile memory device includes: (i) a main chip area including a cell area and an extension area arranged to have a stepped structure, with the cell area and the extension area formed in a multi-stack structure, and (ii) an outer chip area, which surrounds the main chip area and includes a step key therein. The main chip area includes a first layer on a substrate and a second layer on the first layer. A lower vertical channel layer is arranged in the first layer. The step key includes an alignment vertical channel layer, and a top surface of the alignment vertical channel layer is lower than a top surface of the lower vertical channel layer.
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