Invention Grant
- Patent Title: Ceramic sintered body and substrate for semiconductor device
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Application No.: US17317986Application Date: 2021-05-12
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Publication No.: US11897817B2Publication Date: 2024-02-13
- Inventor: Yuji Umeda , Jyunji Oogami
- Applicant: NGK INSULATORS, LTD. , NGK ELECTRONICS DEVICES, INC.
- Applicant Address: JP Nagoya
- Assignee: NGK INSULATORS, LTD.,NGK ELECTRONICS DEVICES, INC.
- Current Assignee: NGK INSULATORS, LTD.,NGK ELECTRONICS DEVICES, INC.
- Current Assignee Address: JP Nagoya; JP Mine
- Agency: MATTINGLY & MALUR, PC
- Main IPC: C04B37/02
- IPC: C04B37/02 ; H01L23/373 ; C04B35/119

Abstract:
In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO2, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO2, the Al content is 74.3 mass %-80.9 mass % in terms of Al2O3, the Y content is 0.8 mass %-1.9 mass % in terms of Y2O3, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO2, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to K2O and the Na content is converted to Na2O. The balance content is 0.05 mass % or less in terms of oxide.
Public/Granted literature
- US20210261473A1 CERAMIC SINTERED BODY AND SUBSTRATE FOR SEMICONDUCTOR DEVICE Public/Granted day:2021-08-26
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