- 专利标题: Micromachined thermal time-of-flight fluidic concentration metering device
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申请号: US17330269申请日: 2021-05-25
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公开(公告)号: US11927555B2公开(公告)日: 2024-03-12
- 发明人: Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
- 申请人: Liji Huang , Yahong Yao , Li Chen , Chih-Chang Chen
- 申请人地址: US CA Santa Clara
- 专利权人: Siargo Ltd.
- 当前专利权人: Siargo Ltd.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: G01N25/18
- IPC分类号: G01N25/18 ; G01F1/68 ; G01F1/684 ; G01F1/69 ; G01F1/692 ; G01F1/699 ; G01F15/14
摘要:
The design and structure of a fluidic concentration metering device with a full dynamic range utilizing micro-machined thermal time-of-flight sensing elements is exhibited in this disclosure. With an additional identical sensing chip but packaged at the different locations in the measurement fluidic chamber with a closed conduit, the device can simultaneously measure the fluidic concentration and the fluidic flowrate. With a temperature thermistor integrated on the same micro-machined thermal sensing chip, the disclosed device will be able to provide the key processing parameters for the fluidic applications.
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