- 专利标题: Superjunction transistor device
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申请号: US17513344申请日: 2021-10-28
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公开(公告)号: US11929395B2公开(公告)日: 2024-03-12
- 发明人: Hans Weber , Ingo Muri , Maximilian Treiber , Daniel Tutuc
- 申请人: Infineon Technologies Austria AG
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 代理机构: Murphy, Bilak & Homiller, PLLC
- 优先权: DE 2018132435.9 2018.12.17
- 分案原申请号: US16715816 2019.12.16
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/265 ; H01L29/66 ; H01L29/78
摘要:
A method and a transistor device are disclosed. The transistor device includes: a semiconductor body; first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of the semiconductor body; transistor cells in the inner region of the semiconductor body, each transistor cell including a body region and a source region, the transistor cells including a common drain region; and a buffer region arranged between the drain region and the first and second regions. A dopant dose in the first and second regions decreases towards an edge surface of the semiconductor body. A dopant dose in the buffer region decreases towards the edge surface.
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