- 专利标题: Interferometer and optical instrument with integrated optical components
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申请号: US17644933申请日: 2021-12-17
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公开(公告)号: US11933609B2公开(公告)日: 2024-03-19
- 发明人: Nobuhide Yamada
- 申请人: YOKOGAWA ELECTRIC CORPORATION , Yokogawa Test & Measurement Corporation
- 申请人地址: JP Tokyo
- 专利权人: Yokogawa Electric Corporation,Yokogawa Test & Measurement Corporation
- 当前专利权人: Yokogawa Electric Corporation,Yokogawa Test & Measurement Corporation
- 当前专利权人地址: JP Tokyo; JP Tokyo
- 代理机构: RANKIN, HILL & CLARK LLP
- 优先权: JP 20211727 2020.12.21
- 主分类号: G01B9/02001
- IPC分类号: G01B9/02001 ; G01B9/02 ; G01J9/02
摘要:
The interferometer 10 according to this disclosure includes: a first optical component 12 that splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path R1 and the second optical path R2 and combines the light to be measured; a second optical component 13 placed in the first optical path; a third optical component 14 that splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detector 11a and an S polarization detector 11b that respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.
公开/授权文献
- US20220196381A1 INTERFEROMETER AND OPTICAL INSTRUMENT 公开/授权日:2022-06-23
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