Invention Grant
- Patent Title: System comprising a multi-beam particle microscope and method for operating the same
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Application No.: US17374494Application Date: 2021-07-13
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Publication No.: US11935721B2Publication Date: 2024-03-19
- Inventor: Dirk Zeidler , Nico Kaemmer , Christian Crueger
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE 2019000470 2019.01.24
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/26

Abstract:
A system includes a multi-beam particle microscope for imaging a 3D sample layer by layer, and a computer system with a multi-tier architecture is disclosed. The multi-tier architecture can allow for an optimized image processing by gradually reducing the amount of parallel processing speed when data exchange between different processing systems and/or of data originating from different detection channels takes place. A method images a 3D sample layer by layer. A computer program product includes a program code for carrying out the method.
Public/Granted literature
- US20210343499A1 SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR OPERATING THE SAME Public/Granted day:2021-11-04
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