- 专利标题: Acoustic wave device and multiplexer
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申请号: US17380068申请日: 2021-07-20
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公开(公告)号: US11936359B2公开(公告)日: 2024-03-19
- 发明人: Akira Michigami
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP 19015718 2019.01.31
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/145 ; H03H9/25 ; H03H9/64
摘要:
An acoustic wave device includes a substrate, an interdigital transducer electrode including electrode fingers on a main surface of the substrate, and a protection film covering the main surface of the substrate, and side surfaces and upper surfaces of the electrode fingers. The protection film includes a portion covering the main surface of the substrate, an intermediate portion between two of the electrode fingers adjacent to each other, and a vicinity portion of the electrode fingers. The intermediate portion is thicker than the vicinity portion.
公开/授权文献
- US20220224307A1 ACOUSTIC WAVE DEVICE AND MULTIPLEXER 公开/授权日:2022-07-14
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