- 专利标题: Process for the preparation of fluorinated quartz glass
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申请号: US17395791申请日: 2021-08-06
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公开(公告)号: US11952302B2公开(公告)日: 2024-04-09
- 发明人: Stefan Ochs , Thomas Kayser , Martin Trommer , Andreas Langner , Sascha Pihan , Kay Schuster , Michael Hünermann
- 申请人: Heraeus Quarzglas GmbH & Co. KG
- 申请人地址: DE Hanau
- 专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: DE Hanau
- 代理机构: Dicke, Billig & Czaja, PLLC
- 优先权: EP 189825 2020.08.06
- 主分类号: C03B19/14
- IPC分类号: C03B19/14 ; C03C3/06
摘要:
A process for the production of a fluorinated quartz glass including the steps of generating SiO2 particles in a synthesis burner; depositing the resulting SiO2 particles into a body; and vitrifying the resulting body, wherein a fluorinating agent having a boiling point greater than or equal to −10° C. is supplied to the synthesis burner.
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