发明授权
- 专利标题: Probe card
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申请号: US17885252申请日: 2022-08-10
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公开(公告)号: US11953521B2公开(公告)日: 2024-04-09
- 发明人: Chao-Cheng Ting , Li-Hong Lu , Huai-Yi Wang , Lung-Chuan Tsai
- 申请人: Bao Hong Semi Technology Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: BAO HONG SEMI TECHNOLOGY CO., LTD.
- 当前专利权人: BAO HONG SEMI TECHNOLOGY CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: MUNCY, GEISSLER, OLDS & LOWE, P.C.
- 主分类号: G01R1/073
- IPC分类号: G01R1/073
摘要:
Provided is a probe card, comprising a guide plate and a shielding structure of single-layer or multi-layer. The guide plate comprises an upper surface, a lower surface, and at least one guide hole passing through the upper surface and the lower surface, and the guide hole is provided with an inner wall surface. At least one layer of the shielding structure is made of an electromagnetic absorption material or an electromagnetic reflection material, and the shielding structure is not connected to a ground. Each layer of the shielding structure is formed on the inner wall surface of the guide hole by means of atomic layer deposition or atomic layer etching, and a thickness of each layer is less than 1000 nm.
公开/授权文献
- US20240053383A1 PROBE CARD 公开/授权日:2024-02-15
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