- 专利标题: Bonding method of package components and bonding apparatus
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申请号: US17876556申请日: 2022-07-29
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公开(公告)号: US11955378B2公开(公告)日: 2024-04-09
- 发明人: Yi-Li Hsiao , Chih-Hang Tung , Chen-Hua Yu , Tung-Liang Shao , Su-Chun Yang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 分案原申请号: US16866565 2020.05.05
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L21/50 ; H01L21/60
摘要:
A bonding method of package components and a bonding apparatus are provided. The method includes: providing at least one first package component and a second package component, wherein the at least one first package component has first electrical connectors and a first dielectric layer at a bonding surface of the at least one first package component, and the second package component has second electrical connectors and a second dielectric layer at a bonding surface of the second package component; bringing the at least one first package component and the second package component in contact, such that the first electrical connectors approximate or contact the second electrical connectors; and selectively heating the first electrical connectors and the second electrical connectors by electromagnetic induction, in order to bond the first electrical connectors with the second electrical connectors.
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